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Low Pressure Oxidation / Annealing

The low-pressure horizontal oxidation and annealing system is designed for high- precision thermal annealing and thermal activation processes across a wide range of solar cell structures. Engineered for versatility and stable performance, it supports advanced cell technologies including PERC, PERT, TOPCon, and BC. With uniform temperature control and optimized process conditions, this system ensures superior film quality, improved passivation, and enhanced efficiency for next-generation photovoltaic manufacturing.

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