Our system utilizes a low-pressure thermal decomposition process to form high- quality silicon oxide and a range of crystalline silicon films. Designed to meet the demanding requirements of tunneling oxidation passivation, it delivers exceptional uniformity and stability for advanced solar manufacturing. This technology is perfectly suited for producing high-efficiency N-type TOPCon and BC solar cells, ensuring superior passivation performance, enhanced cell efficiency, and reliable production for next-generation photovoltaic applications.