This system provides precision polishing for silicon wafer surfaces, following the process flow: Pre- cleaning → Polishing → Post-cleaning → Pickling → Pre-dehydration → Drying. It supports MES, RFID, and optional online weighing, with one-key online washing and solution replacement for fast and easy fluid exchange. The adjustable process circulation volume and compatibility with additives from various brands ensure consistent, high-quality polishing results, making it ideal for advanced solar cell manufacturing.