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Spectroscopy Ellipsometer

A spectroscopic ellipsometer is a scientific instrument used to measure the properties of thin films and surfaces. It operates based on the principle of ellipsometry, which analyzes changes in polarized light as it interacts with a material’s surface. Spectroscopic ellipsometers provide detailed information about material thickness, refractive index, and optical constants across a range of wavelengths, making them invaluable in research and manufacturing for characterizing semiconductor films, coatings, and other thin-film materials.

Category: Product ID: 24006

Description

A spectroscopic ellipsometer is a scientific instrument used to measure the properties of thin films and surfaces. It operates based on the principle of ellipsometry, which analyzes changes in polarized light as it interacts with a material’s surface. Spectroscopic ellipsometers provide detailed information about material thickness, refractive index, and optical constants across a range of wavelengths, making them invaluable in research and manufacturing for characterizing semiconductor films, coatings, and other thin-film materials.

  • Wavelength range : 330nm-1000nm, UV and NIR option available on request
  • Fast automatic measurement
  • Precision measuring film thickness and refractive index
  • Measurement and spectral characteristics of the optical constants of the various functional materials analysis
  • The ellipsometric parameters accuracy of : ≦0.01for Tan (ψ); ≦0.01 for Cos (Δ)
  • Measured directly on a transparent substrate of the thin film deposition without backside scratch or blacken treatment

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