Description
Turnkey solution offered by Laplace Energy-China. This includes the engineering consultancy to the project execution. The main equipments includes :
| 1 | Batch Texture |
| 2 | Batch Texture Load Automation |
| 3 | Batch Texture Unload Automation |
| 4 | Boron Diffusion |
| 5 | Boron Diffusion Automation |
| 6 | Oxidation |
| 7 | Oxidation Automation |
| 8 | Inline BSG Removal |
| 9 | BSG Load Automation |
| 10 | BSG Unload Automation |
| 11 | Rear Polish |
| 12 | LPCVD |
| 13 | LPCVD Automation |
| 14 | PoCl3 diffusion |
| 15 | PoCl3 diffusion Automation |
| 16 | Inline PSG Removal |
| 17 | PSG Load Automation |
| 18 | PSG Unload Automation |
| 19 | RCA |
| 20 | RCA Unload Automation |
| 21 | ALD |
| 22 | ALD Automation |
| 23 | Front-PECVD |
| 24 | Front-PECVD Automation |
| 25 | Rear-PECVD |
| 26 | Rear-PECVD Automation |
| 27 | Printer & Dryer & Fast Firing & light Injection & Test-Sorter |
| 28 | AGV |
| 29 | Graphite Boat Pre-Coating |
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