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Topcon Turnkey Solution

Category: Product ID: 24418

Description

Turnkey solution offered by Laplace Energy-China. This includes the engineering consultancy to the project execution. The main equipments includes :

1 Batch Texture
2 Batch Texture Load Automation
3 Batch Texture Unload Automation
4 Boron Diffusion
5 Boron Diffusion Automation
6 Oxidation
7 Oxidation Automation
8 Inline BSG Removal
9 BSG Load Automation
10 BSG Unload Automation
11 Rear Polish
12 LPCVD
13 LPCVD Automation
14 PoCl3 diffusion
15 PoCl3 diffusion Automation
16 Inline PSG Removal
17 PSG Load Automation
18 PSG Unload Automation
19 RCA
20 RCA Unload Automation
21 ALD
22 ALD Automation
23 Front-PECVD
24 Front-PECVD Automation
25 Rear-PECVD
26 Rear-PECVD Automation
27 Printer & Dryer & Fast Firing & light Injection & Test-Sorter
28 AGV
29 Graphite Boat Pre-Coating

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