Description
Turnkey solution offered by Laplace Energy-China. This includes the engineering consultancy to the project execution. The main equipments includes :
1 | Batch Texture |
2 | Batch Texture Load Automation |
3 | Batch Texture Unload Automation |
4 | Boron Diffusion |
5 | Boron Diffusion Automation |
6 | Oxidation |
7 | Oxidation Automation |
8 | Inline BSG Removal |
9 | BSG Load Automation |
10 | BSG Unload Automation |
11 | Rear Polish |
12 | LPCVD |
13 | LPCVD Automation |
14 | PoCl3 diffusion |
15 | PoCl3 diffusion Automation |
16 | Inline PSG Removal |
17 | PSG Load Automation |
18 | PSG Unload Automation |
19 | RCA |
20 | RCA Unload Automation |
21 | ALD |
22 | ALD Automation |
23 | Front-PECVD |
24 | Front-PECVD Automation |
25 | Rear-PECVD |
26 | Rear-PECVD Automation |
27 | Printer & Dryer & Fast Firing & light Injection & Test-Sorter |
28 | AGV |
29 | Graphite Boat Pre-Coating |
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